Thermal evaporation is one of the most commonly used methods for deposition of thin films on to various substrates. In this process, a resistive heat source is used to evaporate a solid material in a vacuum environment. The vacuum is used to allow vapour molecules to condense directly on to the substrate, where vapor molecules condense back to a solid state, creating a solid film. In micro/nanofabrication thermal evaporation is used to make macro- and nanoscale products such as metallized plastic film. Each thermal evaporation system includes a vacuum pump and a thermal energy source to evaporate the coating material. In this process, the coating material (often metals and alloys) in the form of wire, pellet or powder is placed in a tungsten or molybdenum crucible and heated by an electric filament to form a pool of molten metal and finally evaporate.

The thermal evaporation apparatus manufactured by Lotus Co. is used to perform thin-film deposition processes associated with the manufacture of advanced electronic sensors such as impedance sensors, electrochemical sensors, MEMS accelerometers, microfluidic-based biosensors, pressure sensors, gas sensors, etc. Among the features of this system which distinguishes it from other similar domestic systems are thin-film uniformity and process high reproducibility through the use of advanced control systems. Film uniformity and process reproducibility are of the paramount importance in sensor manufacturing process, in a way that the production of high-quality sensors highly depends on the control of above-mentioned factors.