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Single and Double Side Optical Mask Aligner

Photolithography is a process used in microfabrication to transfer geometric patterns to a film or substrate.

April 24, 2019 Industrial Services
Website : www.azhineh.ir‎

Photolithography is a process used in microfabrication to transfer geometric patterns to a film or substrate. The importance of lithography can be appreciated in two ways. First, due to a large number of lithography steps needed in Integrated Circuits (IC) manufacturing, lithography typically accounts for about 30 percent of the cost of manufacturing. Second, lithography tends to be the technical limiter for further advances in feature size reduction and thus transistor speed and silicon area. Although lithography is certainly not the only technically important and challenging process in the IC manufacturing flow, historically, advances in lithography have gated advances in IC cost and performance.

The main core of any lithography device is its exposure system. Because the minimum feature size that can be transferred with high fidelity to a resist film on the surface of the wafer is highly related to the wavelength of the light source. In this product, the UV lamp is used to expose the photoresist.

It should be noted that in real projects it is necessary to create several layers on each other and in these cases alignment of layers together is needed. Alignment system consists of a mechanical system for high-resolution movement of the sample, microscope and exposure system.

Application

  • Fabrication of Integrated Circuits (IC), data storage devices, miniaturized sensors, MEMS and NEMS

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